Used EBARA EPO S-010 #159147 for sale

EBARA EPO S-010
ID: 159147
CMP system.
EBARA EPO S-010 is an advanced wafer grinding, lapping & polishing equipment that offers high precision surface processing for compound semiconductors and quartz material. The system features a central rotary head design that enables simultaneous wafer grinding, polishing, lapping and polishing process cycles. It is made of stainless steel and strong alloys, ensuring that the unit is highly durable and efficient. The rotary head design of EPO S-010 machine provides a highly uniform surface finish as well as fast and accurate processing. The tool uses diamond grinding tools that are designed to efficiently polish the edges and surface of the wafer, resulting in high accuracy, surface finish and even chip density. The asset also features a rotating polishing cloth that can be set up to produce uniform thickness, allowing consistent surface finish and preventing surface damage. EBARA EPO S-010 has a built-in digital controller that is designed to optimize the process parameters and parameters of the grinding and polishing tools, as well as to simplify the set-up and operation of the model. This allows for easy operation and fast processing cycles. The digital controller also features various settings that allow users to save and recall their grinding and polishing parameters, ensuring reproducibility and accuracy of the process parameters. In addition to the advanced features of EPO S-010, the equipment is capable of achieving the highest surface finish values with minimal time input and delivers outstanding results for both hard and soft materials. The system features an innovative Diamond Disc Technology (DDT) mechanism, which ensures that diamond grinding tools are used with the highest accuracy and uniformity. The DDT mechanism was developed to increase grinding speed and reduce the time used for loading-unloading process and maintenance time. The unit also offers a high process yield of the wafers and high process repeatability, allowing the user to achieve tight control over the quality of the finished product. The robust design of EBARA EPO S-010 provides reliable performance, low cost of ownership and ease of use, making it one of the best available systems for high precision surface processing of compound semiconductors and quartz materials.
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