Used EBARA Frex 200 #9293811 for sale

EBARA Frex 200 is a fully integrated, wafer grinding, lapping & polishing system. This machine features a Computerized Numerical Controller (CNC) that allows for precise and repeatable movements on the surface of the wafer. The CNC utilizes closed-loop controls to regulate and monitor surface finish parameters such as removal rate, breakouts, and particle free zone control. The first step of the process is grinding the wafer surface. This involves the selection of an appropriate grinding stone and the use of the CNC guided robotic arm. This allows for higher precision with a wide range of grinding stone sizes. EBARA FREX200's grinding stone size range from 2" to 10", and is capable of grinding both standard and non-standard wafers. Next, the wafer enters the lapping process. This is when the precise and repeatable CNC guided robotic arm applies a lubricant to the wafer while setting a range of lap speeds. FREX-200's lapping speeds range from 400rpm to 14,000rpm and are adjustable to meet specific process requirements. Next, the lapping head is mounted and a platen is spun at high speed, allowing for uniform abrasion and polishing of the wafer. Finally, the wafer is transferred to the polishing station. This station has several ports that house adjustable-pressure polishing pads, enabling the operator to polish a wide range of wafer surface areas and types. This polishing process is combined with a micro-dynamic pressure system to ensure uniform quality of the wafer. F-REX200 also features a manual wafer buffing wheel with a specially designed buffing pad that helps to reduce edge-cracking. Frex 200 effectively combines wafer grinding, lapping and polishing into one automated system to provide precision, repeatability, and high production throughput. Through the utilization of the CNC, FREX200 can produce highly consistent results for a variety of wafer applications. By both accurately grinding and polishing wafers, this machine can provide users with precise and accurate surface finishes. EBARA F-REX200 is a perfect fit for any operation that requires the highest quality wafer finishing.