Used EBARA Frex 300 #293723869 for sale
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ID: 293723869
Wafer Size: 12"
Vintage: 2010
CMP System, 12"
CIM: SECS / GEM
Process: Tungsten
Handler system
(4) FOUP
2010 vintage.
EBARA Frex 300 is a wafer grinding, lapping and polishing equipment designed for the high-precision mirror lapping and grinding of semiconductor wafers. It is capable of generating highly accurate surfaces with high aspect ratio structures and lower overall surface roughness. The system consists of a main unit, a control unit, a grinding and polishing spindle and a wafer transfer stage. The main unit of EBARA FREX-300 consists of a grinding and polishing motor, a spindle, a controller and a robot arm. The motor is powered by a servo motor drive which drives the spindle and controls the speed of the grinding and polishing process. The robot arm transfers the wafers from the transfer stage to the grinding and polishing spindle. The control unit of the unit is a proprietary software package which provides precise and consistent operation of the machine. It can be programmed to execute various grinding and polishing operations on a variety of wafers and can be used to monitor the grinding and polishing processes. The grinding and polishing spindle is a unique design which enables the grinding of complex geometries. It is also capable of producing high quality lapped surfaces with a high mirror finish. The spindle is coupled with a precision drive, providing a highly accurate and repeatable grind and polish. The wafer transfer stage provides precise and accurate automatic transfer of the wafers to the grinding and polishing spindle. This enables the tool to produce precise and high-quality lapped surfaces. F-REX300 is designed for high-precision lapping, grinding and polishing of semiconductor wafers. Its robust design, high-accuracy capability, and repeatable precision make it an ideal choice for semiconductor manufacturers and R&D facilities. It is capable of creating highly accurate surfaces with minimal surface roughness and high aspect ratio structures.
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