Used EBARA Frex 300 #293768436 for sale

ID: 293768436
CMP System.
EBARA Frex 300 is an innovative wafer grinding, lapping and polishing equipment, designed to provide unbeatable performance and flexibility at an economical price. This state of the art system has been especially developed to meet the ultra-precise demands of the most demanding microelectronics applications. EBARA FREX-300 is particularly suited to the production and processing of high-end semiconductors such as wafers for memory, logic and optical chips. F-REX300 provides an excellent grinding and polishing solution with precision motion controlled processes. It is equipped with two grinding/polishing spindles at 60,000 RPM which are especially designed for maximum accuracy and reliability. The spindle drive unit is capable of controlling both speed and torque, offering superb motion control. The dual spindles also provide an optimal solution for grinding and lapping of dual sided substrates and wafers. FREX-300 features a dedicated wafer load module. This automated machine ensures high levels of accuracy and flexibility throughout the grinding and polishing processes. By using intelligent motion control technology, the wafer can move from station to station with precision and accuracy. This helps to significantly reduce handling time and minimize material waste. Frex 300 also features a polygon wafer carrier tool. Sophisticated software ensures the highest degree of accuracy for any wafers between 10mm and 200mm. The wafer is held securely in contact with the grinding wheel or lapping plate using high speed, precise electro-pneumatic clamps. EBARA F-REX300 asset is designed to be energy efficient, using one of two available drive motors to reduce energy consumption. It also features an efficient liquid filtration model that helps to minimize wastewater. In addition, a fully automated CCD camera equipment and metrology system are included to ensure optimal precision while minimizing wasted wafer material. F-REX 300 provides the perfect solution for any high precision microelectronics wafer processing application. With unmatched precision and innovative technologies, EBARA F-REX 300 offers unbeatable performance and reliability.
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