Used EBARA Frex 300 #293829696 for sale

EBARA Frex 300 is a state-of-the-art wafer grinding, lapping and polishing equipment, designed for grinding, lapping and polishing of silicon, sapphire and other optical materials. This system provides precise, uniform, and highly predictable results as it offers up to 5 axis of multi-axis control during the entire grinding and polishing process. The unit utilizes a rotary table, allowing for a higher grinding rate and greater wafer-to-wafer consistency due to the constant and precise adjustment of the rotary table speed. The grinding table is driven by a powerful DC servo motor, ensuring precision grinding and lapping while avoiding mechanical stress on the wafers and processing components. EBARA FREX-300 is equipped with 3 stations, each station equipped with specific spindles and grinding tools, facilitating rapid tooling changes as well as customized tool sequences. Additionally, the machine has a built-in air-flow control, ensuring optimum air flow during wafer surface processing. The air flow control eliminates dust-adhesion on the wafer surfaces and avoids scratching the upper portion due to surface static electricity. For better accuracy, the main precision grinding and lapping is generally conducted separately from the abrasive slurry grinding. The former uses a disc adjusting belt for precise feeding and control of grinding or polishing. The abrasive slurry grinding is conducted in a wet environment and uses an online slurry feed tool to ensure precise slurrying adjustment and accuracy. F-REX300 has pre-programmed grinding options, offering the choice of grinding modes such as rough grinding, fine grinding, polishing, ultra-smoothness, and mirror surface polishing. A fully automated solution, the asset is designed to improve the accuracy and repeatability of the grinding process and eliminates manual fine tuning, reducing operator error. Finally, FREX-300 is designed to prevent vibration and other machine related problems during the grinding process by using a vibration damper. The model is designed to be environmentally friendly, energy efficient and provides LCD touch panel displays and other features to improve operator convenience and accuracy.