Used EBARA Frex 300 #9212102 for sale

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ID: 9212102
CMP System Qty Part description (1) Cl1-l drain pipe (1) Cl1-r drain pipe (1) Cl2-r drain pipe (1) Sponge holder assy (c) (1) Sponge holder assy (d) (4) Rubber seats (4) Cross recessed head machine screws m2x8 (8) Cross recessed head screws m3x8 (4) Cross-recessed head screws m3x8 (4) Cross recessed head screws m3x8 (12) Cross recessed head screws m3x10 (14) Cross recessed head screws m3x16 (8) Cross recessed head screws m3x20 (4) Cross-recessed machine head screws m3x30 (4) Cross-recessed head screws m4x8 (4) Cross recessed head screws m4x10 (10) Cross recessed head screws m4x12 (6) Cross recessed head screws m4x15 (4) Cross recessed head screws m4x16 (6) Cross recessed head screws m4x25 (8) Cross recessed head screws m5x16 (4) Cross recessed head screws m6x15 (4) Cross recessed machine head screws m3x6 (8) Cross recessed head screws m3x8 (18) Cross recessed head screws m4x8 (3) Cross recessed head machine screws m4x10 (2) Hexagon socket headless set screws m3x5 (1) Hexagon socket set screw m4x10 (1) Hexagon socket headless set screw m5x6 (12) Cross hole truss small screws m3x4 (12) Cross recessed truss head screws m3x6 (14) Cross recessed truss head screws m3x10 (17) Cross-recessed truss head screws m4x6 (4) Cross recessed truss head screws m4x8 (20) Cross recessed truss head screws m4x10 (8) Cross recessed truss head screws m5x8 (9) Cross recessed truss head screws m5x10 (1) Joint bolt, roll (8) Hexagon socket head cap screws m3x4 (9) Hexagon socket head cap screws m3x8 (12) Hexagonagon socket head cap screws m3x10 (1) Hexagon socket head cap screw m3x16 (6) Hexagon socket head cap screws m3x20 (2) Hexagon socket head cap screws m3x25 (4) Hexagon socket head cap screws m4x6 (22) Hexagon socket head cap screws m4x8 (11) Hexagon socket head cap screws m4x10 (4) Hexagon socket head cap screws m4x12 (24) Hexagon socket head cap screws m4x16 (1) Hexagon socket head cap screw m4x25 (8) Hexagon socket head cap screw m5x8 (2) Hexagon socket head cap screw m5x14 (32) Hexagon socket head cap screw m5x16 (2) Hexagon socket head cap screw m5x25 (3) Hexagon socket head cap screw m6x10 (14) Hexagon socket head cap screw m6x20 (4) Hexagon head bolt m4x10 (10) Hexagon head bolt m4x25 (2) Hexagon head bolt m5x10 (2) Hexagon head bolt m6x30 (3) Sp bolt (1) Nut, cleaning arm (d) (1) Nut, cleaning arm (c) (2) Plate nut 300 (22) Plain washer m3 (35) Plain washer m4 (32) Plain washer m5 (1) Washer (2) Weight case washer (1) Washer (2) Spring pin (2) Spring pin 3x8 (2) Spring pin 4x12 (2) Pivot shaft (1) Shaft (1) Shaft, roll (1) Parallel key 3x3x10 (1) Coupling (2) Ball bearing (1) Bearing ss6800zz (4) Ceramic bearing, 6800 (2) Beariing (7000st) (1) Timing belt (2) Spring, nozzle, roll (3) Spring (2) O-ring p12 (1) O-ring p20 (1) O-ring g730 (12) O-ring s4 (5) O-ring s7 (2) O-ring s16 (1) O-ring s20 (2) O-ring s22 (1) O-ring s32 (1) O-ring s75 (1) O-ring s95 (1) O-ring s270 (1) O-ring s290 (3) O-ring as568a-216 (1) O-ring as568-#022 (1) Gasket, cover (2) Gasket, d pan (1) Seal assy (1) Balance weight (ur) (1) Cylinder (1) Cylinder (2) Handle (2) Center nozzle (4) Nozzle (3) Latch (3) Air cylinder (1) Pfa tube (1) Soft nylon tube (4) Pliant tube (2) (1) Joint (j) drain (2) Pfa tube (4x3) (5) Pvc saddle (3) Ts-saddle 20a (1) Reducing union tee adapter (1) Piping adapter set (2) Piping adapter l type (4) Elbow union (1) Elbow union (1) Male elbow (6) Union elbow (8) Union elbow (6) Union elbow (8) Union elbow (8) Reducing union elbow (1) Quick connector socket (1) Male branch tee (1) Plug (13) Plug (12) Plug, seal retainer, w.r. (2) Union (1) Reducing union (8) Half union (1) Tube flange (1) Flange (1), bellows (1) Flange (2) bellows (1) Air operated valve (1) Air operated valve (1) Block manifold (l) (4) Speed control (3) Regulator (2) Regulator (4) Block (2) (1) Chuck arm (1) (1) Chuck arm (2) (1) Arm, ur (2) Guide (1) (1) Front cover (upper) 300 (1) Protector frame (l1) (1) Bearing cover (1) Belt cover (1) Cable cover (1) Cover, arm, ur (2) Collar, brg (d10x5), rol. (2) Collar, brg (d19x5), rol. (1) Collar (1) Collar, roll (1) Collar, spd (1) Cap (1) Sco cap (1) Bearing clamp (1) Connector clamp (3) Tube, clamp, drain (1) Bearing case (1) (1) Bearing case (2) (1) Case, center nozzle, ur (4) Chuck piece (4) Saddle, tube and cable, catm (3) Saddle, tube, arm (2) Support, center nozzle, roll (1) Pipe support (l) (3) Hose support, chem (2) Sco shim (2) Sco shim (2) Sco shim (2) Sco shim (1) Bellows, upper roll (1) Block stage (2) Stopper (1) Plate, washer, arm (4) Daistad (1) Table assy (1) Drain pan (j) (2) Dry hand (1) 300 (1) Bracket (1) Bracket (1) r (3) Bracket (1) (2) Weight case bracket (1) Shaft bracket, ur (1) Flange, seal, roll (1) Motor bracket (1) D/r plate (2) Seal plate l1 (1) Seal plate l2-r (1) Seal plate l2-l (1) Plate, chem (1) Sco plate (1) Rod block (1) Pipe block (1) Base, loadcell, ur (2) Holder, center nozzle, roll (1) Holder (1), motor bracket (4) Tube holder chem (2) Holder, cable, arm (1) Holder, seal, roll (1) Rod end (3) Sp washer (1) Drive center (2) Clip (ar19) (2) Clip (wr10) (6) Joiner set (1) Pivot channel (1) Screw, cleaning arm (d) (1) Screw, cleaning arm (c) (1) Tvme 3903v (1) Tvme 3902v (2) Uniwire board (1) Amplifier (1) Driver, sgdm-01bda (1) Vacuum sensor amp (1) Driver, sgdm-08ada (1) Ac servo (2) Controller mc001-tk (1) Pressure sensor (1) Fiber unit (1) Power unit, digital epw-002 (1) Driver, asd13c-a (1) Driver, asd13c-a (2) Driver, asd13a-a (1) Ac servo motor (1) Ac servo motor (1) Uni wire end unit (1) Digital pressure monitor (1) Load cell (1) Flow meter (1) Power terminal (2) D/a converter (1) Sticker (1) Sticker (2) Lamp, fluorescent, polisher (1) Lamp, fluorescent, mini enviornment (2) Glow lamp igniter (2) Lamp, fluorescent, cleaner Pins and connectors: (100) / Connector pins (m) awg 26-20 (100) / Connector pins (m) awg 20-16 (100) / Connector pins (f) awg 26-20 (100) / Connector pins (f) awg 20-16 (20) 2 Pins, receptacle, elr-02v (16) 3 Pins, receptacle, elr-03v (20) 4 Pins, receptacle,elr-04v (6) 6 Pins, receptacle, elr-06v (24) 2 Pins, receptacle, elp-02v (16) 3 Pins, receptacle, elp-03v (20) 4 Pins, receptacle,elp-04v (6) 6 Pins, receptacle, elp-06v.
EBARA Frex 300 is an automated wafer grinding, lapping and polishing equipment used to finish and polish semiconductor wafers. It is designed to provide high precision and repeatability, and is suitable for use in research and development laboratories. EBARA FREX-300 is a precision machine for flat wafer lapping and polishing. It has a flat workpiece bed that is angled from 0-45 degrees, so that the sample can either be processed horizontally or vertically according to its size. The machine also utilizes a unique two-position double micro lapping/polishing plate system to ensure even and uniform processing. It also has a digitally controlled, in-situ sample holder to prevent sample motion while processing. F-REX300 is designed for flexible, safe, and accurate operation. It is equipped with a total of 10 control functions for process parameters, including grinding, lapping, and polishing. In addition, the unit is connected to a data processing platform for data acquisition and analysis of performance parameters during the process. EBARA F-REX300 also has a fully automated sample handling machine, which is an integral part of the overall machine. It features a computer-controlled movable loader, allowing samples to be loaded and unloaded from the machine with minimum supervision and user intervention. A specimen transport tool is also provided to move the wafers to and from the loader. FREX-300 is designed to provide reliable results with a maximum of 1µm roughness deviation to ensure isotropic polishing of the surface is achieved. It can process a variety of different materials with different polish specifications, from light grinding to high gloss polishing. Moreover, F-REX 300 can be easily integrated to work with standard wafer processing systems, such as diamond polishing or etching. This makes it an ideal solution for R&D and production environments. EBARA also provides lifecycle and maintenance services for the machine, ensuring that Frex 300 remains services optimally.
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