Used EBARA Frex 300 #9244969 for sale
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ID: 9244969
Vintage: 2002
CMP System
Standard head
Integrated cleaner:
Stage 1: (2) Roll / Roll sponges
Stage 2: (2) Pencil sponges / SRD
(2) Tables per tool
Polish head per table
Missing parts
2002 vintage.
EBARA Frex 300 is a state-of-the-art wafer grinding, lapping and polishing equipment for microelectronics and photovoltaic applications. It is designed and manufactured by EBARA Downstream Technology (EDT), a leading global supplier of precision machining solutions for advanced materials. This three-axis machining system features a built-in grinding wheel spindle and a highly efficient Polisher/Lapper for quick and accurate results. Its rigid construction ensures high accuracy and repeatability, making it suitable for squeezing out the maximum performance from the most delicate wafers. It can be used for grinding wafers from 6" up to 300mm in diameter. The unit is suitable for a wide range of materials, such as silicon, quartz, sapphire, glass, ceramic and quartz-based electronics. Its robust design is suitable for high-volume production throughput, and its superior productivity and cost-effectiveness help minimize unnecessary cost and wastage. The machine is equipped with the latest linear and rotary motion systems, as well as advanced software solutions for improved process yields and material savings. To ensure precise results, it is equipped with a double-optical compensation tool, which compensates for different form errors and angular settings. EBARA FREX-300 also comes with a special collection unit and smart dust collection, minimizing maintenance and downtime. Other advanced features include an intelligent strain monitoring asset for enhanced reliability and an advanced 7-inch colour LCD graphical user interface that simplifies operation. Furthermore, the model houses advanced ergonomic features, such as a 360-degree swivel grind head for easy operation, vibration dampening for improved precision and adjustable speed and temperature control for optimized production results. Its integrated vibration monitoring equipment further ensures smooth operation and reduced vibration during operation. F-REX300 is a highly reliable and efficient machine for precision wafer grinding, lapping and polishing. It is an ideal solution for producing high quality, low cost parts with reduced scrap rates and improved production throughput.
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