Used EBARA Frex 300S #9225525 for sale

EBARA Frex 300S
ID: 9225525
Wafer Size: 12"
CMP System, 12" 2007 vintage.
EBARA Frex 300S is a fully automated wafer grinding, lapping, and polishing equipment designed to offer maximum efficiency and excellent results. This system can process a wide range of single and multi-side wafer through a series of grinding, lapping, and polishing processes. EBARA FREX300S has integrated detection technology, which will automatically detect, locate, and measure the wafer features, guiding the user through the correct grinding parameters. Designed for cleanliness and safety, the unit is enclosed in a stainless steel and plastic housing. This design offers protection from dust, airborne particles and other contaminants. All access points have been equipped with air filters and mirrors for visual control of particles and particulates. To ensure the machine functions correctly, the housing contains an internal pressure transducer and atmospheric pressure sensor. F-REX300S utilizes a modular tool, with a combination of static and dynamic components. This ensures that the asset can accommodate wafer sizes from 50mm to 400mm. The static components of the model include the base and frame, tank, water supply and pump, and the pressure control equipment. The dynamic components consist of a high-speed motor, servomotors, sensors and optical systems, monitoring and control computers, and a user interface. The design allows for the user to select from a variety of grinding, lapping and polishing options. The grinding process includes a small rotary diamond disc, which is applied to the wafer surface, removing surface irregularities and preparing it for any successive processes. Lapping and polishing can also be applied to the wafer surface by using a combination of an abrasive paper and diamond wafer polishing pads. The user can customize their process and monitor them in real-time with the integrated monitoring and control systems. By using this system, users can obtain the highest quality, high-precision results EBARA F REX 300 S delivers.
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