Used ENGIS EJ-380 #9143445 for sale

ENGIS EJ-380 is a state-of-the-art wafer grinding, lapping and polishing system designed to produce superior surface finishes and wafer straightness on semiconductor wafers up to 8" in diameter. EJ-380 utilizes a proprietary "Vibra-Jar" to effect a rotating platen coupled with horizontal motion to produce a smooth, consistent, repeatablestrophic cross motion suitable for single or multi-platen configurations. ENGIS EJ-380 features the ability to diamond grind, abrasive lap, and pressure polish with a minimum of abrasive change-over. The automated control system also includes database parameter storage, allowing users to store and recall process settings as needed. EJ-380's spindle head incorporates a patented, semi-permanent bond diamond lap with continuous diamond dress cycles, ensuring excellent workpiece flatness and uniformity. The included in-process wafer straightness measurement arrangement ensures the highest possible yields. Other features include a spindle head in-process monitoring feature to detect and alert the operator when abnormal vibration or overheating are detected, as well as auto-stop functionality to prevent any possible damage due to part tolerance issues. ENGIS EJ-380 offers complete programmability for each unique process step, including pressure, speed, overlap and dwell time settings. The operator friendly control interface also feature an intuitive, graphical menu-driven interface for all systems, incorporating engaging graphics and touch pad controls. EJ-380 is designed to automatically detect and store part parameters for both the inner and outer edges of the wafer, allowing for exact repeatability of each operation for successive wafer runs. ENGIS EJ-380 is designed for easy maintenance and comes equipped with long life polyurethane wear plates and fixtures to ensure operator safety. The Vibra-Jar is also easily replaced without any tools or fixtures. EJ-380 is further protected from any possible malfunctions through an onboard diagnostic feature, with the ability to quickly reset all process settings while in operation. The durable and reliable construction of ENGIS EJ-380 ensures a long life of operation and superior wafer grinding, lapping and polishing performance.