Used FUJI KOGYO 9B-5L #9276659 for sale

FUJI KOGYO 9B-5L Wafer Grinding, Lapping and Polishing Equipment is a precise and efficient system for precision surface polishing of Semiconductor Wafers. The unit is equipped with two double-sided grinding and polishing stations, allowing two wafers to be processed simultaneously. Each station is capable of handling a 6", 8" or 12" wafer. The machine offers fast process times with low particle contamination. 9B-5L tool is designed for grinding, lapping, and polishing of various materials including Silicon, GaAs, InP, Sapphire, and Quartz. The asset can be used for the process of etching, grinding, lapping, polishing, backside conditioning, and blanking of wafer substrates. The model includes a 600/110rpm spindle rotation speed, 2000 nor 600rpm plate rotation speed and adjustable platen base pressure. A programmable parameters such as pressure, speed, rotation direction, and tilt angle can be selected to ensure process accuracy. The equipment includes a precision four-axis chuck and chuck drive. FUJI KOGYO 9B-5L has a digital control panel that is designed to provide precise control of the grinding and polishing process. It can set the pressure, rotation speed, rotation direction, and tilt angle. The touch screen panel also allows programming of individual process parameters. The system is equipped with a software that provides detailed process control. The software includes a range of options for automatic control such as elapsed time, total laps per wafer, travel distance and steps per wafer. The unit utilizes a 9" HB diamond grinding wheel for wafer preparation and a 4" HB diamond grinding wheel for wafer edge grinding. The machine also includes lapping plates, polishing pad sets and a BEOS chamber to regulate the temperature and pressure of the polishing process. 9B-5L offers a user-friendly design which ensures high process repeatability and a clean operating environment with very low level of particle contamination. This ensures that each wafer is processed according to the highest standard.