Used HAMAI 6BN-3M5L #9398250 for sale
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ID: 9398250
Vintage: 2011
Double sided lapping machine
Lap plates: 361.7 mm x 171.7 mm x 24 mm
(5) Carriers with 143.54 mm OD Diameter
3-Way motor drive system
Motor:
Bottom plate: 0.75 kW
Center gear: 0.75 kW
Ring gear: 0.75 kW
Speed:
Bottom plate: 2 - 20 RPM
Center gear: 1 - 10 RPM
Ring gear: 1- 15 RPM
Patented upper plate flex-link system
CPU Controlled variable pneumatic pressure system
Touch screen control system
Upper plate air cylinder stroke: 160mm
Automatic scale thickness measuring system
(3) Independent drive motors
With variable speed and direction control
Multiple position stainless ring gear (20 mm)
Automatic plate flattening system
Tower Lap: Red, yellow, green
Automatic upper plate locking system
Emergency stop switch
Hardened steel upper plate holder
Ring gear
Sun gear
Color: RAL7035 Cream-white epoxy resin paint
Air supply: 5 kg/cm2 (90 psi) at 4 L/min maximum
Controls and slurry system power supply: 110 V, 3 Phase, 50/60 Hz
Power supply: 220 V, 3 Phase, 50/60 Hz
2011 vintage.
HAMAI 6BN-3M5L is a precision wafer grinding, lapping and polishing equipment that provides superior results for a wide range of semiconductor components and applications. Its modular construction and advanced technological solutions provide customers with a fast, accurate and automated solution for their wafer processing needs. 6BN-3M5L allows for superior fine surface finish on a variety of materials. It is a highly efficient system that can grind, lap, and polish wafers to the highest precision. The machine includes a grinding station, a polishing plate station, and a metrology station. The grinding station features an adjustable motor speed, feed rate, work-holding fixture and operation speed. This revolutionary design gives maximum control to the operator for precision grinding of semiconductor wafers. The polishing plate station has a large turntable with a fully automated and programmable polishing process. There are a number of preset programs available with customizable ones also available. The polishing plate is constructed with a double-action spindle and large particle filter allowing for maximum accuracy and repeatability. The metrology station includes a series of high-precision metrology measurements, including surface roughness, flatness and profile measurements. The unit features an integrated laser interferometer which provides accurate results. This helps to ensure process quality and integrity. HAMAI 6BN-3M5L is an intelligent, automated and easy-to-use machine that provides superior grinding, lapping and polishing results. It is capable of reproducing high-precision wafer-related products with minimal setup time. This machine is ideal for semiconductor engineers, technicians and production personnel.
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