Used IPEC / WESTECH / SPEEDFAM 472 #9028335 for sale

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ID: 9028335
CMP system Has run Oxide and Cu Currently in storage Can be inspected 1998 vintage.
IPEC / WESTECH / SPEEDFAM 472 is a multi-functioning wafer grinding, lapping and polishing equipment widely used in semiconductor industries. This system is designed to support all processes with 12 or 15" wafer equivalent, and suitable for both low- and high-volume production. The unit is equipped with a 7-axis programmable control and a force feedback machine to ensure consistent grinding pressure. IPEC 472 is equipped with a wide range of grinding wheels and diamond lapping discs that allow fine grinding of wafers to nanometer precision. Its ergonomic and intuitive design makes it possible to switch between grinding and lapping process rapidly and without user intervention. The tool is designed with a high-performance slurry asset for polishing soft and delicate materials, as well as for critical deposition and cleaning of substrates, enabling the creation of an optimal finish. WESTECH 472 is suitable for a variety of materials, such as silicon, III-V compounds, SiGe, InP and GaAs, as well as some ferromagnetic materials. The model also has the capability to process wafer carriers, as well as open-nozzle and closed-nozzle polishing. 472 is a powerful tool for achieving precise, high-quality and uniform surface finish with minimal downtime. Its integrated diagnostics equipment and alarm functions allow users to quickly detect and identify any issues that could delay the process. Moreover, its modular design makes it incredibly easy to upgrade, maintain and expand in the future. In short, SPEEDFAM 472 is a reliable, precise and versatile wafer grinding, lapping and polishing system for the semiconductor industry.
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