Used IPEC / WESTECH / SPEEDFAM 472 #9210304 for sale

IPEC / WESTECH / SPEEDFAM 472 is a wafer grinding, lapping and polishing equipment designed to serve the needs of the semiconductor industry. This system is built for high accuracy, high productivity and low cost of ownership. It incorporates an automatic wafer changer, CCD surface profile measurement and multiple spindle grinding/polishing head to reduce cycle times and maximize unit performance. IPEC 472 is composed of a single housing containing three processing stations and a machine control unit. The stations include grinding/polishing station, lapping station, and an optional additional processing station or an inspection station. The grinding/polishing station can accommodate up to eight processing heads and utilizes a CCD automated surface profiling tool to monitor and adjust the grinding/polishing process for best performance. A diamond dispense asset is integrated with the grinding/polishing station for quick and accurate diamond application with no operator intervention over the process. The lapping station is equipped with up to three adjustable lapping heads used to achieve the desired flatness, smoothness and surface profile depending on application requirements. The lapping station also includes a particle size and vibratory separator for quick and efficient separation of diamond slurry particles. The optional additional station or inspection station is equipped with a microscope for visual inspection capability and a laser interferometer for accurate non-contact measurement and feedback of in-process results and/or on-line control of the process. Various features are included in WESTECH 472 to help ensure maximum model throughput and quality results. The proprietary process control architecture supplies precision process control including spindle speed, pressure, and timing. A telescopic wafer loader allows for fully automatic loading and unloading of wafer directly into the machine's delivery equipment. The utility cabinet provides clean and dry compressed air and cooling water filtration system. Also, a vacuum filtration unit helps maintain a closed loop process to reduce hazardous dust contamination and operator exposure. Overall, SPEEDFAM 472 is a reliable and productive machine that is part of a family of machines that are designed for highest accuracy, efficiency, and yield in wafer grinding, lapping, and polishing. This tool is suitable for complex wafer grinding, lapping, and polishing applications and is ideal for manufacturers looking for high throughput, low cost of ownership, and low ppm processing.