Used IPEC / WESTECH / SPEEDFAM Avanti 472 #293750600 for sale
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ID: 293750600
Vintage: 1996
Automatic wafer polisher
APP1000 Pad conditioning
Pressure (CDA): 100-80 psi (N2)
Vacuum: >-20 Hg
Compressed air peak flow: 6 SCFM (170 SLM)
Nitrogen peak flow: 10 SCFM (283 SLM)
Chilled water peak flow: 5 GPM (18.9 l/min)
DI Water:
Peak flow: 12 GPM (45.4 l/min)
Average flow: 2-5 GPM (7.57-18.9 l/min)
Power supply: 208-460 VAC, 50/60 Hz, 3-Phase
Manual
1996 vintage.
IPEC / WESTECH / SPEEDFAM Avanti 472 is a four-station grinding, lapping and polishing machine that can be used to process and refinish semiconductor wafers. This machine is designed to provide superior performance, accuracy, and repeatability in wafer grinding, lapping and polishing processes. This equipment has a modular design that allows for easy configuration for different process requirements and provides rapid transition between processes. IPEC Avanti 472 is able to process up to four wafers simultaneously. WESTECH Avanti 472 is equipped with two lapping tables and two polishing tables for processing wafers in each station. These tables are designed for high speed action with low-vibration operation, allowing for precise control over the entire process. The system is equipped with two dedicated AC motors for each lapping and polishing disk, providing excellent timing and stable speed control. The adjustable speed option optimizes the adjustment of loading and speed conditions. Avanti 472 comes with three types of grinding media that are capable of meeting a wide range of application requirements. These grinding media include diamond grit, ceramic grit, and silicon carbide grit. Each type of grit provides a different level of polishing action, allowing the user to best meet their particular needs. In addition, the grinding media can be switched in between processes to adjust the values of the finished product. The unit features a programmable process controller to provide a simple and user-friendly interface. This controller allows users to program the process parameters according to their specific needs, as well as provide diagnostics and feedback on the process settings. The controller can store up to twenty separate programs for recalling different settings quickly and easily. In addition, the machine is equipped with an attack angle monitor to monitor the grinding/polishing angle of the wafer and a grinding depth monitor to track overall depth of the grinding process. Finally, SPEEDFAM Avanti 472 machine is automated with a series of sensors and loaders for unattended operation, allowing for superior productivity, flexibility, and accuracy.
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