Used IPEC / WESTECH / SPEEDFAM Avanti 472 #9259193 for sale

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ID: 9259193
Vintage: 1997
CMP System 1997 vintage.
IPEC / WESTECH / SPEEDFAM Avanti 472 is a wafer grinding, lapping & polishing equipment designed for use in semi-conductor wafer fabrication applications. This system can achieve very uniform surface finishes with at most minor dishing and side wall flatness. The unit can also support a wide variety of substrates and materials for processing operations. The machine is composed of three main components: an electrostatic chuck, a polishing table and a motorized rotary table. The electrostatic chuck features a two-step heating temperature and is adjustable to accept up to 8" diameter substrates. The polishing table is made from coated, corrosion-resistant aluminum and has adjustable speed control for both maximum rpm and finish quality. Finally, a motorized rotary table enables up to 16" wafers to be processed and preserved. The table also has variable speeds for lapping and polishing that offers optimization and results that are more consistent than a manual operation. Additionally, the tool can also be fitted with a number of accessories such as a temperature controller, vacuum chucks, force gauges and a timing asset. A temperature controller ensures that the desired temperature is maintained throughout the processing. Vacuum chucks are available to securely hold wafers in place during polishing and lapping operations. Force gauges are used to monitor the downward pressure applied to the wafer, ensuring a consistent polishing force throughout the operation. Finally, the integrated timing model provides accurate start/stop intervals, allowing for precise polishing operations. Overall, IPEC Avanti 472 is a comprehensive and automated wafer grinding, lapping & polishing equipment designed for use in semi-conductor wafer fabrication applications. This system offers precise, repeatable and efficient polishing operations, making it an ideal choice for semiconductor and microelectronics industries.
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