Used LOGITECH PM5 #293630266 for sale

LOGITECH PM5 is an automated wafer grinding, lapping & polishing equipment used in processing semiconductor wafers. This system is highly efficient and specifically designed to meet the demanding requirements of coupled processes such as grinding, lapping, and polishing. The machine is equipped with a 300 mm or 450 mm automatic double-sided grinding unit as well as a 300 mm or 450 mm single-sided polishing chamber. It has a cooling control valve and a vacuum chuck for efficient precision grinding and polishing. Additionally, the machine can perform a dual-chamber lapping process for wafers of different thicknesses. Furthermore, a flexible automation unit allows for multi-tasking and integration of other processing steps. The heart of the machine consists of several components including a precision drive machine and a grinding/polishing unit which are synchronized to provide excellent surface finish. The grinding/polishing unit is equipped with two diamond heads which are independently driven by two programmable frequency motors to deliver precise and uniform results. The diamond heads rotate at 4000/5000 rpm and generate a near-perfect spherical surface finish. The machine is also fitted with advanced sensors and an intuitive user interface which allows for easy parameter setting. It also offers a number of safety features such as an emergency stop button, crush protection and a central unit which constantly monitors the performance of the machine and produces a detailed audit report. In summary, LOGITECH PM 5 wafer grinding, lapping & polishing tool is a highly efficient and advanced CMP machine designed for production-level throughput. Its easy-to-use user interface and detailed audit report allow for precise and uniform surface finish. Its flexible automation asset allows for integration of multiple processing steps, making it suitable for a variety of applications.