Used LOH / WETZLAR R-F1 #9161353 for sale
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LOH / WETZLAR R-F1 is a fully automated wafer grinding, lapping and polishing equipment, designed to reach the high quality requirements of the semiconductor industry. It is capable of running in fully automated mode with minimal operator intervention, allowing for high throughput and increased efficiency. LOH R-F1 system features an air-bearing spindle which can be adjusted for axial and radial runout. This is further supported by two stepper motors, which provide maximum control and precision, achieving superior surface flatness. The lapping head can be locked for quick and easy changing of the abrasive polishing pad, and has a large swivel angle range for processing wafers of varying thicknesses. The unique design of the lapping arm provides stable and repeatable results, whilst the air-bearing slurry distributor and seal ensure accurate and consistent chemical application. The grinding, lapping and polishing process is all managed through the intuitive and easy-to-use touchscreen interface. This enables the unit to be configured precisely in accordance with customer specification. The user-friendly design also allows for batch mode operation, where the operator can set up multiple programs for repeated sequences. Additional parameters such as pressure and pad speed can also be adjusted in real-time, optimizing the process and improving throughput. WETZLAR R-F1 uses advanced cooling systems to ensure the best possible surface finishes and minimal sample damage. This includes cooling jackets on all rollers, as well as an advanced air-condenser cooling machine. The tool is also equipped with a PLC safety controller and a number of safety functions, including overspeed and over-temperature protection, to ensure operator protection and sample integrity. Lastly, R-F1 enables full process traceability, allowing for all production processes to be easily monitored, tracked and controlled. The asset also allows for full record keeping and reporting, providing information on all parameters which can be used to optimize processes and product quality.
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