Used NOVELLUS / IPEC / WESTECH / SPEEDFAM 676 #9304134 for sale

ID: 9304134
CMP Polishers (3) Main frames APM modules have been removed.
NOVELLUS / IPEC / WESTECH / SPEEDFAM 676 is a wafer grinding, lapping and polishing equipment designed for the production of advanced semiconductor integrated circuit (IC) packages. The system features three stages—grinding, lapping and polishing—to produce the highest quality wafers. During the grinding stage, IPEC 676 unit uses an advanced direct-drive spindle motor to spin at a nominal speed of 10,000 RPM, permitting it to process wafers at high speeds without compromising on quality. The grinding stage uses an abrasive medium, such as diamond or alumina, embedded in a galvanized steel wheel to remove excess material from the wafer surfaces. This generates thermal shock that can cause micro-cracks, which WESTECH 676 machine prevents with an in-situ device that controls the temperature at the grinding wheel. The lapping stage reduces the surface roughness of the wafer using a loose abrasive, such as diamond powder or alumina powder. The lapping process is done in a medium slurry and mechanical vibration is applied to the lapping plate by an automated controller to ensure consistent results. The final stage of SPEEDFAM 676 tool is the polishing stage. During this process, the wafer is spun at a slow speed and a polishing pad is moved across the wafer's surface in a highly controlled fashion. This helps to remove the roughness from the wafer and create a smooth finish. The asset features a graphical user interface with intuitive icons which help with the navigating through the different processing stages. The model also contains a variety of built-in process recipes for different wafer types, as well as modules for data collection and analysis. This helps to ensure top-notch quality control and provides efficient performance. Overall, NOVELLUS 676 is an advanced solution for grinding, lapping and polishing sophisticated IC packages with an intuitive user interface and versatile process control capabilities. The equipment is designed to deliver fast results while maintaining high levels of accuracy and consistency.
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