Used OKAMOTO ASM-420M #9216418 for sale

ID: 9216418
Slicing systems 1998-2014 vintage.
OKAMOTO ASM-420M is a wafer grinding, lapping and polishing equipment designed to operate as a complete, automated solution. The system is equipped with a dual spindle, each capable of processing up to eight inch diameter wafers. The two spindles provide independent control over grinder and polisher operation, allowing for the precise surface finishing results. The unit is programmed to automatically calibrate itself for optimal process and productivity, allowing for reduced programming time. Grinding and polishing are achieved by placing the wafers in holders and fastening them onto the spindle holders. Once the wafers are placed, gap and contact detection is carried out to measure the surface profile and defects. The grinding process is achieved by the two grinding wheels located on each spindle. The spindle has linear acceleration and deceleration and is adjustable to ensure precise grinding of the wafer. The polishing process is done through the part changing polisher, which is located on the vertical axis. This allows the polishing pad to move up, down, and sideways in a circular motion. The wafers are then transferred to the back-end after grinding and polishing. This module consists of a wafer deglazing machine and an optional post-processing module. The deglazing tool uses of a rotating brush and chemical solution to remove the last remaining contaminants from the surface. The post-processing module is used to perform inspections and adjust the surface roughness by employing chemical means. The entire workflow is monitored and regulated by the process monitoring asset which measures and records the grinding and polishing temperatures, gaps, and contacts. This model provides complete control over the process parameters, allowing for large numbers of wafers to be processed, while maintaining consistent quality. ASM-420M is an efficient solution for wafer grinding, lapping and polishing, offering superior flexibility and scalability. Its advanced performance and process control ensure reliable and repeatable results, while its automated operation allows for reduced setup and programming times.
There are no reviews yet