Used SHUWA SGM-6301 #9256700 for sale

SHUWA SGM-6301 wafer grinding, lapping & polishing equipment is a precision automation system for grinding, lapping and polishing of wafers to submicron and nanometer quality levels. The unit is suitable for grinding, lapping and polishing various semiconductor materials and interconnection layers. SGM-6301 automated machine comprises a highly efficient robot loader that can accommodate up to 8 wafer holders and is capable of transferring wafers between chambers. The integrated software provides both cup wheel and frequency-driven mode to achieve superior uniformity and repeatability. The whole tool is integrated with an advanced motion control asset that ensures accurate motion of each axis. A single table positioner in SHUWA SGM-6301 allows for grinding, lapping and polishing of wafers on a single platform. It has an adjustable model pressure for uniform pressure distribution, as well as a dynamically adjustable tilt angle to achieve uniform grinding and lapping results. The equipment also has an adjustable grinding, lapping and polishing speed as well as adjustable accelerations/decelerations. SGM-6301 system includes three separate grinding/polishing chambers where wafer holders are loaded. Two of the chambers are for grinding and lapping operations while the third chamber is used for polishing operations. The unit includes two different grinding wheels which enable grinding and lapping of wafers with different size and shape. The machine also has an active polishing platen which is capable of producing surface finish of 0.1μmRa or better. SHUWA SGM-6301 wafer grinding, lapping & polishing tool offers long service life and low maintenance costs due to its use of superior quality parts and shielding components. Its integrated communication protocol and multilingual programming features allow for quick and easy setup without any costly engineering resources. The asset also has a wide range of optional features such as an extended wafer handler, vacuum wafer handling and extended data logging and monitoring capabilities.