Used SPEEDFAM 18B-5LNS #9007409 for sale
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ID: 9007409
Vintage: 1684
Lapping machine, Direct reed, 3motor, tank attached, 1984 vintage.
SPEEDFAM 18B-5LNS is an integrated wafer grinding, lapping and polishing equipment from SPEEDFAM America, Inc. The unit is designed to finish-process multiple wafers of various diameters, from 2-inch to 8-inch, at high speeds within the semiconductor manufacturing process. The system combines all process steps from pre-polishing to final lapping to achieve superior surface finishes on both sides of the wafers. 18B-5LNS polishing machine is designed for optimal performance with many cutting-edge features. Features such as a low-profile design for easier loading and unloading of wafers, an improved fixed apron assembly to reduce undulate wafer surfaces, and advanced pneumatically operated dividers that provide the flexibility to process all sizes of wafers. The machine also utilizes an advanced PC-based motion controller for improved accuracy and repeatability. The automated grinding, lapping and polishing functions of SPEEDFAM 18B-5LNS are designed to be easy and efficient for the operator. The unit is equipped with two independent side-By-Side processing carriages. Each carriage includes separate independent loading trays that are equipped with chucks. The carriages are 3 axes mechanically driven with high-performance brushless servo motors. These feature a microfinished-lapped/ground slides and cross feed mechanism that provide superior smoothness and repeatability. 18B-5LNS unit is equipped with a special precision-engineered spindle assembly that ensures accurate execution of all process parameters. This is supplemented with an adjustable-height, gravity-feed, wafer handling machine that reduces semiconductor waste and debris accumulation. The tool is also designed with a configurable captive/non-captive polishing process option, with swivel-style back-up pad assemblies that enable controlled particle deposition. SPEEDFAM 18B-5LNS asset is thoroughly evaluated for quality and performance to ensure its full capability to consistently meet customer requirements. The model is now available with a range of standard and custom pre-configured options, like multiple grinding wheels, special scrubbers, automation controllers and video-inspection systems. 18B-5LNS equipment is an indispensable tool for the semiconductor industry, enabling better process stability and minimum production lead-times.
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