Used SPEEDFAM 22B-5L #9175935 for sale
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ID: 9175935
Vintage: 1984
Lapping system
(3) Motors
Eddy current sizing device included
1984 vintage.
SPEEDFAM 22B-5L is a equipment used for grinding, lapping and polishing semiconductor and other wafers. This system is used primarily to precision-surface finish wafers after fabrication processes that require accurate and repeatable results. 22B-5L features a 12 inch five-station tool changer with individually adjustable drive motors for controlling the wafer's process speed. The table-like design eliminates the need for removable seal plates and provides an accurate and consistent grinding surface. The unit is capable of simultaneous grinding, lapping and polishing, making it highly efficient and reducing the turnaround time of large batches of wafers. SPEEDFAM 22B-5L also includes a touch screen control panel for users to conveniently and quickly adjust settings to optimize the specific process they require. This process machine features a built-in programmable logic controller that manages the entire process. It includes a microprocessor loaded with functions such as setting the pressure for grinding, lapping and polishing, as well as setting up the rotational speed, feed rate and number of passes. The controller also stores the parameters for future use. 22B-5L uses diamond grinding wheels and lapping plates to achieve a high quality finish. The grinding wheels and lapping plates can be replaced easily and standardized for consistent results. The tool also comes with a wide range of options such as a fixed or rotating table and various load capacities to best meet the process requirements. SPEEDFAM 22B-5L is a user-friendly asset with superior process control that can achieve precise micro-finishing results, greater throughput and improved quality control. This model is recommended for multi-step grinding, lapping and polishing applications where accuracy and speed are critical.
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