Used SPEEDFAM 28B-5L #9276644 for sale

SPEEDFAM 28B-5L
ID: 9276644
Double sided lapping system (3) Motor Touch panel.
SPEEDFAM 28B-5L Wafer Grinding, Lapping & Polishing Equipment is a multi-purpose system designed for high precision grinding, lapping, and polishing of wafers and thin substrates. The unit is capable of handling a wide range of processes such as surface flatness, roughness, emphasis, smoothening, abrasion, polishing of oxide, hardmask, and dielectric layers. 28B-5L machine is equipped with a variable speed, direct drive motor that delivers a superior performance and reliability. The spindle motor has programmable digital speed control with dynamic speed adjustment for accuracy. The tool can also be adjusted to provide a constant torque throughout its operating range. To control the wafer grinding, lapping and polishing processes the asset has an automated process control model which is designed to ensure that all of the parameters related to speed, press, time, feed-rate and pressure are kept in optimal range. SPEEDFAM 28B-5L equipment also features a full-length work chamber that is well-ventilated and can be kept dust-free for single-wafer processing applications. The system also has a digital touchscreen interface that allows operators to quickly change the process parameters. The unit also includes a high-polishing machine for special wafer-polishing applications. This tool is designed to provide the highest quality surface finish and to increase yields and repeatability of the wafers. 28B-5L asset is also equipped with an exhaust model to capture and filter any moisture or dust created during the processing. This is done to prevent any contamination of the wafers. Overall, SPEEDFAM 28B-5L equipment is designed to meet the strictest requirements of wafer grinding, lapping and polishing. The system is designed to provide consistent, high-quality results that meet the exacting requirements for substrate processing and for achieving precise metrology standards. The unit is widely used in the semiconductor and flat panel display industries for a wide range of process requirements.
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