Used SPEEDFAM 36 GPAW #9287337 for sale

SPEEDFAM 36 GPAW is a fully automated, programmable wafer grinding, lapping and polishing equipment designed for grinding, lapping and polishing flat and angled wafer edges in a single clamp-set process. SPEEDFAM 36GPAW is a state-of-the-art system that combines advanced robotics, high accuracy, and superior process control to provide wafer edge grinding, lapping and polishing operations of unparalleled reliability and quality. 36 GPAW unit is comprised of multiple modules. The robot-loaded clamp set module consists of an automated robotic arm and clamp machine, ensuring wafer loading to the grinding wheel is fast and precise. The back grinding module includes a precision clamping tool and grinding wheel to reliably grind the wafer back surface. The edge grinding module includes automatic positioners to accurately position the wafer for grinding and ensure that all edges are precisely ground, lapped and polished. The lapping/polishing module utilizes a high-precision, electronically-controlled, rotary table and an adjustable speed rail asset to precisely position wafers on the lapping/polishing platter. The back grinding and lapping/polishing module feature integrated contour mapping, ensuring the best possible edge profile quality. 36GPAW also includes an automated QC inspection model to verify the quality of the finished product. SPEEDFAM 36 GPAW offers a number of additional features including process traceability, statistical process control (SPC) capabilities, programmable work centers, and an intuitive touchscreen control interface. It is suitable for all semiconductor processing applications, including semiconductor device fabrication, MEMS/MOEMs, advanced wafer manufacturing, and thin film technology. The equipment is designed to provide superior performance with an impressive combination of accuracy, repeatability, and maximum throughput. The advanced automation provided by SPEEDFAM 36GPAW ensures reproducible results at the highest levels of quality, while the advanced process controls guarantee reliability and repeatability for high-volume manufacturing and demanding production requirements.