Used SPEEDFAM 36B #9217163 for sale

SPEEDFAM 36B is a wafer grinding, lapping and polishing equipment for single-side or double-side processing of semiconductor materials. The unit has the capability to grind, lap, and polish perfectly round substrates from a variety of roughness levels down into the nanometer range. This system can be used for mechanical polishing of substrates, such as microelectronic and optoelectronic components, for yield and productivity improvement. The unit consists of two main components: 36B tool holder and the polishing table. The tool holder holds the grinding wheel, lapping plate and polishing pad; its design ensures that the different materials will not be damaged during the grinding, lapping and polishing processes due to its stable structure. The multi-axis polishing table allows for precision movements during each step of the process, which provides repeatability and throughput accuracy. The table also has a closed-loop precision drive unit that allows for precise speed and feedback monitoring during operation. The machine has a wide range of grinding capability with a variety of wheel options. The standard grinding wheel speeds range from 800 to 8000 rpms. Additionally, the tool features SPEEDFAM CW-5A Polishing Heads, which offer consistent velocity control for a wide range of lapping and polishing applications. The lapping plate can also be adjusted from 0 to 80 mm in diameter for grinding and lapping operations. The polishing pad offers a maximum rotation speed of 6,000 rpm and has a 6-inch diameter that is compatible with all of the polishing heads. SPEEDFAM 36B is a versatile and reliable wafer grinding, lapping and polishing asset for high-precision applications. It has the ability to grind, lap and polish to near-perfect surfaces, allowing increased yields and tighter tolerances. Its features include a closed-loop feedback loop for precision speed control and adjustable wheel rotation speeds. The unit's zero-maintenance design requires minimal operator intervention, making it a great choice for process-dependent and biologically sensitive operations.