Used SPEEDFAM 9B-5L-IV #9191615 for sale

SPEEDFAM 9B-5L-IV
ID: 9191615
Vintage: 1996
Single side wafer lapping system 1996 vintage.
SPEEDFAM 9B-5L-IV is a truly innovative wafer grinding, lapping, and polishing equipment. This intuitive system is specifically designed for today's most critical materials, from gallium nitride (GaN) semiconductors to silicon-on-insulator (SOI) devices. It features a six-axes industrial robot capable of supporting two process heads, a large diameter wheel and a polycool wheel. It also has a cutting head and a soft belt grinder. The cutting head and soft belt grinder feature speed adjustment and digital positional control, allowing for precise cuts and grinding of small meshes. The industrial robotic arms create high precision and repeatability, significantly reducing material loss and production rejects. Furthermore, ensure a low defect rate and high yield. 9B-5L-IV is equipped with a large diameter wheel that processes large substrates in one step by grinding and lapping. This wheel is equipped with vacuum chucks and is adjustable, allowing for different types and sizes of substrates to be processed. The polycool wheel is a unique and specialized wheel for lapping and polishing large substrates. This wheel houses a cooling chamber filled with a water-based coolant. The coolant is circulated over the wheel by specialized pumps, allowing for a steady, constant cooling. This cooling reduces thermal gradients and heat-related defects, allowing for excellent surface finishes. SPEEDFAM 9B-5L-IV also features a powerful electrical drive, which reduces power consumption and increases lifetime reliability. Additionally, its advanced diagnostics, alarm unit and automatic safety shutoff machine make it a user-friendly, safe and reliable tool. 9B-5L-IV is a high-tech, cost effective and reliable wafer grinding, lapping and polishing asset. Its unique features and abilities make it an ideal choice for the processing of today's challenging substrates. It's an innovative solution for materials that need the highest polishing precision.
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