Used SPEEDFAM 9B-5L-S #9043712 for sale

SPEEDFAM 9B-5L-S is a versatile automated precision wafer grinding, lapping, and polishing equipment. This system is designed for applications including dicing, backgrinding, CMP and polishing of wafers up to 150mm. It is a high-precision unit that is capable of achieving sub-micron accuracy. The machine consists of a 920mm x 600mm lapping plate and five 600mm x 200mm lapping mounting stations. Each lapping station is equipped with a servo motor and encoder that controls the lapping surface motion, providing precise control of the lapping speed and direction of motion. The lapping pads are positioned in such a way as to minimize particle contamination and allow for efficient dust collection. The grinding station of 9B-5L-S is equipped with a high torque, low speed motor that is capable of reaching speeds up to 20,000 RPM. SPEEDFAM 9B-5L-S is capable of performing both dry and wet grinding, making it suitable for a wide range of applications. The lapping stage of the tool is equipped with a multi-step programmable cycle control. This allows users to configure the lapping process to match the requirements of their application. It also ensures that the lapping process is repeatable and traceable for future auditing. Additionally there is the option to incorporate a calibration cycle, which automatically compensates for wear of the lapping plates. The polishing stage of 9B-5L-S is equipped with a load cell, a servo motor and an encoder that provides precise control over the process. There are programmable parameters that allow the user to adjust the pressure, rotation speed, and speed ramp for different requirements. SPEEDFAM 9B-5L-S is a reliable and robust asset that is capable of producing exceptional results. It provides precise control over grinding, lapping and polishing processes, ensuring uniform finish on the wafers. It is suited to applications that require precise wafer processing and is ideal for use in manufacturing operations where high standards of quality control are required.