Used SPEEDFAM Auriga C #141544 for sale
URL successfully copied!
ID: 141544
Fully integrated post-CMP cleaner for dry-in, dry-out processing
Double side PVA cleaning through 2-brush boxes using common chemistries
Cleaner water tracks and non-contact rinse ring for minimal surface contact
SECS-II and GEM compliant.
SPEEDFAM Auriga C is a wafer grinding, lapping and polishing equipment that is a versatile platform ideal for the production of substrates and other products. Auriga C offers excellent surface finish quality and high throughput. Its advanced design allows it to be used for many different applications in the semiconductor manufacturing industry, such as thinning, back-side grinding, surface grinding, lapping, and polishing. SPEEDFAM Auriga C is equipped with a high-speed spindle that can reach speeds up to 15,000 rpm, with an adjustable range from 400 to 8,000 rpm. The spindle utilizes FAG E-learning technology, providing accurate and repeatable results throughout many wafer grinding cycles. The machine also features a magnetic force drive system that offers excellent grinding capability for both soft and hard materials. This drive unit is able to maintain the accuracy of the grinding process, regardless of the material's hardness. The machine's modular design allows it to be completely customized, allowing for a reduction in cycle time and continued productivity. This includes a wide range of grinding media, ranging from steel to diamond abrasives. The additional option of a spin-on filter ensures the purity of the fluid used. Auriga C is also equipped with dust collection and a dust protection device to reduce contamination. The dust collection tool is easy to maintain, and has an integrated dust filter asset, with an easy-to-use vacuum cleaner frame. The model also includes a powerful programmable logic controller (PLC), which automatically controls all aspects of the wafer grinding, lapping and polishing process. This allows for custom settings to be designed for specific applications, ensuring repeatability and accuracy. SPEEDFAM Auriga C features a combination of high-precision testing equipment, automated systems, and software designed to ensure consistent, high-quality results for substrates and components. Auriga C is the ideal equipment for a wide range of manufacturing requirements, providing production accuracies, flexibility, and high-performance capabilities.
There are no reviews yet