Used SPEEDFAM EPX 300X #9398834 for sale

SPEEDFAM EPX 300X is a fully automated wafer grinding, lapping and polishing equipment designed for customers who require high performance and speed for their production needs. It is designed for large production runs, with a maximum process throughput of up to 300 wafers/hour. The process module can be configured with a 4-axis lap plate and a polishing head. It comes with a dedicated abrasive media dispenser, a method engineering library, a process monitoring and control system, and a computer interface. EPX 300X incorporates advanced design features for producing high accuracy results with superior cost-effectiveness. The machine can precisely control the thickness of the workpiece, as well as the friction between the abrasive media and the workpiece surface. This enables uniform grinding, lapping and polishing performance across the entire wafer. The unit also features the ability to fast-track the process and measure tool wear, ensuring increased productivity and consistent results. The polishing head of SPEEDFAM EPX 300X can be controlled by an innovative rotation/slave logic that prevents unwanted wobbling and enhances polishing patterns. Additionally, the programmable digital control unit (DCU) allows for automated process start/stop, temperature control, and programmed data entry. The program memory runtime can be stored and transferred to different platforms and allows for easier data tracking. In order to ensure the safety of personnel, EPX 300X is equipped with several safety features. It features both physical and electronic interlocks to protect personnel from direct contact hazards. Rotor and motor speed are constantly monitored using optical and electronic sensors. Additionally, it is constructed with durable, corrosion-resistant material sealed against dust and liquids. SPEEDFAM EPX 300X is a top-of-the-line wafer grinding, lapping and polishing machine designed to maximize production speed and cost-effectiveness. Its advanced features, safety features, and innovative design make it an ideal choice for customers who require high-precision results and process control.