Used SPEEDFAM JND 9B-5P-IV #9166274 for sale
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ID: 9166274
Vintage: 1991
Double sided lapping / Polishing machine
Surface plate diameter: φ 600
SUS Plate
1991 vintage.
SPEEDFAM JND 9B-5P-IV is a fully automated wafer grinding, lapping and polishing machine designed for high-accuracy semiconductor processing. The equipment offers a wide range of capability from grinding large wafers (diameters of up to 6 inches) to providing ultra-high polish finishes. The system has a three-step process which includes two grinding stages and one polishing stage. During the grinding stages, the machine uses a diamond-tipped tool to impart a very high surface finish on the wafer. In the polishing stage, the diamond tool is replaced with a polyurethane lap and the wafer is slowly spun around its center while being manually held against the lap surface. This allows for a very accurate and uniform polishing process. JND 9B-5P-IV unit is composed of an electromechanical wafer handling unit, a circulation filtration unit, a grinding & polishing table, a slurry dispensing unit, and a computer control station. The wafer handling unit has a modular design which allows for two different diameters of wafer processing at a time. It also has a built-in safety feature to prevent breakage or contamination of the wafers during handling. The circulation filtration unit continuously filters the used abrasive for reuse. The grinding and polishing table features two separate motor-driven diamond tool holders. The two holders are adjustable vertically and horizontally to accommodate various sizes of wafers. The slurry dispensing unit is a gravity-fed container which supplies the correct amount of liquid slurry to the diamond tool holders. The computer control station is used to program and monitor all of the machine's parameters including wafer size & thickness, grinding & polishing time, and surface finish. Overall, SPEEDFAM JND 9B-5P-IV is a reliable and highly-accurate wafer grinding, lapping, and polishing machine that is well-suited for semiconductor processing applications. Its modular design ensures easy setup and use and its computer control station allows users to quickly and efficiently program and monitor the tool for optimal results.
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