Used STRASBAUGH 6DS-SP #293831747 for sale
URL successfully copied!
Tap to zoom
ID: 293831747
Wafer Size: 6"
Vintage: 2012
CMP Polisher, 6"
ENTEGRIS wafer carrier PA194‑60MB‑61C02
Dual‑lot processing capability with four internal cassettes (2 sender, 2 receiver)
2012 vintage.
STRASBAUGH 6DS-SP Equipment is an automated wafer grinding, lapping, and polishing system. It is designed for high precision sample preparation and can process materials ranging from 2" (50.8 mm) to 6" (152.4 mm) in diameter. It is suitable for a wide range of applications, including optoelectronics, advanced semiconductor devices, materials research, MEMS and bio-imaging. STRASBAUGH 6 DS-SP includes a variety of features that improve accuracy and consistency of sample processing. Specifically, the 6-position precision spin stage allows for high reproducibility and fast sample loading. In addition, the unit comes with a specially designed lapping base plate as well as a wafer carrier with quick access clamps and a holder that ensure samples do not move during processing. An integrated microscope objective is also included, which can be used to observe the sample during lapping. 6DS-SP machine is equipped with a number of software and hardware options, including real-time process monitoring and recipe management, as well as an automatic spindle deburring tool for fast and safe sample loading. The automated grinding process combines three distinct stages - grinding, lapping, and polishing - which are performed sequentially to achieve high wafer quality and uniform surface finish. All processes are also highly repeatable and reproducible, ensuring accurate sample preparation every time. The asset is also equipped with an integrated filtration model that prevents the introduction of dust particles and other contaminants into the process. The filtration module includes a disposable filter cartridge, a drain to collect waste liquids, and an air dryer that dries the substrate after each cycle. This ensures the cleanliness of the substrate, as well as improved quality of the finished product. 6 DS-SP equipment is compliant with ESD and CSA standards, and complies with environmental regulations. It has a low noise level and can run in continuous operation mode, ensuring a reliable and clean sample preparation process. STRASBAUGH 6DS-SP system is a powerful and versatile tool for precise and consistent sample grinding, lapping, and polishing, making it suitable for a wide range of applications.
There are no reviews yet