Used STRASBAUGH 6EC #9329077 for sale
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ID: 9329077
Wafer Size: 4"-8"
CMP System, 4"-8"
With touch screen
Slurry pump
Manual included.
STRASBAUGH 6EC is a high-performance, precision wafer grinding, lapping and polishing equipment designed for the fabrication of semiconductor, compound, and optical wafers. This system represents the upper echelon of wafer processing technologies used for creating superior surface finishes on the most demanding substrates. STRASBAUGH 6 EC incorporates multiple grinding and lapping heads to create a more precise and uniform finish, and its advanced automation enables accurate process control and faster cycle times. The grinding and lapping process combines abrasive grinding with lap plates and proprietary software to achieve a superior finish on substrates requiring less post-processing. All critical components are driven by precision motion control hardware and 6 E C also includes a laser interferometer-based in-process metrology option which measures finished wafers in-process. 6EC includes a full line of consumable supplies including single and double sided grinding/polishing plates, slurry concentrates, and pads for lapping and polishing. This allows users to achieve consistent and reproducible results even when transitioning between materials that are not compatible. 6 EC also provides a number of features to help improve productivity including automated loading and unloading, quick-change lapping/polishing tooling, and automated process recipes. STRASBAUGH 6 E C is equipped with an advanced vacuum unit that provides smooth, consistent material transport and maximum surface cleanliness. The machine also includes a rugged frame construction and a safety-integrated design for reliable and safe operation. The tool's intuitive graphical user interface allows technicians to monitor and adjust process parameters in real-time. In summary, STRASBAUGH 6EC is a world-class, high-performance grinding, lapping, and polishing asset for achieving excellent surface finish on the most demanding substrates. It provides users with precise process control, short cycle times, and a comprehensive consumable line to achieve consistent and reproducible results. The intuitive graphical user interface allows technicians to monitor and adjust process parameters in real-time and the advanced safety model ensures reliable and safe operation.
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