Used STRASBAUGH Planarizer #9197592 for sale

STRASBAUGH Planarizer is an advanced wafer grinding, lapping and polishing equipment designed to provide high-performance wafer planarization and surface quality. This system uses multiple grinding and polishing stations to enhance the surface quality of device layers, such as oxide, nitride, polysilicon, tungsten, metal, and other specialised structures. A fully-customizable control unit allows on-the-fly customization to match and meet substrate requirements to produce near-perfect substrates for a wide range of applications. Planarizer's main components include an evenly balanced, fully-sealed sub-platen machine. This dynamic sub-platen tool uses multiple flexible air cylinders to hold and evenly distribute the grinding and polishing pressure across the entire grinding footprint and consistently throughout the grinding and polishing cycle. It provides superior control of process parameters such as platen flatness, grinding pressure, and grinding and polishing consistency to create superior finished wafers. The substrates are moved to the grinding and polishing stages of the process in optimized and automated fiducial recognition robotics. A unique chuck dampening asset is designed to evenly distribute grinding and polishing pressures over the whole substrate surface, while eliminating potential imperfections in the finish due to buckling or uneven lapping pressure. The grinding and polishing is controlled by a closed loop feedback model to accurately monitor pressures and process parameters during the process. STRASBAUGH Planarizer also features a high-resolution optical imaging equipment for verification of the finished substrate surfaces. This system uses stereo-microscopes and patented bright field/dark field imaging technology to provide in-process imaging and verification for a variety of features including scratches, non-uniformities, step height, thickness, flatness, and other advanced surface roughness parameters. Planarizer offers a full range of sputtering and single-side polishing solutions with customized configurations to meet application-specific process recipes and needs. It is designed with a capability for quick implementation of new process recipes due to its patented table control and automated fiducial recognition robotic technologies. The combination of these technologies allows STRASBAUGH Planarizer to be deployed for a wide variety of grinding and polishing needs.