Used STUDER RHU 400 #9066964 for sale

STUDER RHU 400 is a next-generation wafer grinding, lapping, and polishing equipment designed to produce superior planarization and reduction of coefficient of thermal expansion (CTE) variations in the layers of wafers. This system utilizes a ceramic-coated polishing plate to ensure superior surface finish with a high degree of planarization. RHU 400 is equipped with an advanced computer control unit for automatic operation, allowing for precise grinding, lapping, and polishing cycles to be set according to the desired CTE reduction and surface finish. The machine's 600-mm-diameter wafer holder is designed to keep the wafer uniformly flat during the entire grinding, lapping, and polishing process, with a unique air pressure feature for maintaining uniformity and avoiding damage. This tool is also capable of handling the highly varying thicknesses of wafers, as it is equipped with servo-controls that provide simultaneous regulation of both accuracy and speed. STUDER RHU 400 features an automated Chem-scrubber for removing impurities from the wafer. Additionally, the asset is equipped with five different polishing tools, including an abrasive disc, piston lapping, brush, stainless steel grid, and aluminium slurry plate. These tools are designed to achieve the best surface finish and planarization possible. RHU 400 is also equipped with an Auto Sensor Gun, which is an advanced data collecting device for monitoring the entire grinding, lapping, and polishing process. This device ensures that all cycle times are recorded and automates statistical process control (SPC) for improved quality control. STUDER RHU 400 is one of the most advanced and reliable wafer grinding, lapping, and polishing systems available on the market. It is designed to offer superior CTE reduction and surface finish, while providing essential data for process control and quality assurance. With auto-sensor technology and five polishing tools, this model is ideal for large-scale wafer fabrication applications requiring superior planarization.