Used AMAT / APPLIED MATERIALS FABS-202 #9166885 for sale
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ID: 9166885
Wafer transfer station
APPLIED MATERIALS Endura etcher system
RORZE
Type no: OCRR8151-001-001
(10) Axes
RORZE Robot
Type no: RR700L120-Z30-011
RORZE Robot controller
Type no: CURR-1076-2.
AMAT (APPLIED MATERIALS)/AMAT / APPLIED MATERIALS FABS-202 wafer handler is a motorized, vacuum-handling equipment designed for the fast, accurate loading of semiconductor wafers into high-temperature ship-drawers and furnaces. This system is an ideal choice for both production and laboratory manufacturing. AMAT FABS-202 features an integrated vacuum handling unit with reliable wafer-to-chuck alignment. Its one-shot wafer loading and unloading capability enables quick loading and position adjustments, ensuring precise alignment. The vacuum machine is driven by an adjustable motor speed control, allowing customizable wafer handling for varying chip sizes and types. An independent vacuum tool allows for customized ground rules, promoting efficient movement of individual wafers to and from the platform. APPLIED MATERIALS FABS-202 also includes a "ground rules" function, which can be used to set process-specific loading parameters, saving time and increasing accuracy. It is also designed to streamline the wafer loading process, with the addition of a fully adjustable stop. This stop can be adjusted to reduce the time needed for wafer in and out position, making it possible to process multiple wafers in parallel. The unit has a very low profile, allowing for easy installation in a production floor. FABS-202 comes with a digitally controlled z-axis for exact control of the wafer heights. Its graphical user interface (GUI) allows for intuitive operation and easy viewing of parameters, enabling users to quickly adjust settings for optimal performance. It is also equipped with an auto sensing feature, which shuts off when the temperature of the furnace exceeds a pre-set limit. This asset also includes an emergency stop button, allowing users to shut down the model in cases of emergency. AMAT / APPLIED MATERIALS FABS-202 can be used in a variety of thermal processes, including annealing, procces-window creation, high-temperature damage tests and more. This equipment is also equipped with a range of safety features, such as automatic over temperature protection, lower motor shut-off, EMI-shielded motors, and a low level voltage disconnect. Furthermore, AMAT FABS-202 is CE approved and compatible with ISO 9001 standards, making it a powerful and reliable device that provides maximum security and reliability.
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