Used AMAT / APPLIED MATERIALS Rorze RR6140 #157593 for sale
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ID: 157593
Wafer transfer station
200VAC, 60 Hz
Includes:
RR304L120-123-001 ATM wafer handler robot, 1998 vintage
Controller.
AMAT / APPLIED MATERIALS Rorze RR6140 is a multi-functional pre-aligner and wafer handing device designed for efficient and reliable handling of wafers at fabs. It is used to accurately transport and index wafers in the wafer run and feed systems. The RR6140 is a fully automated unit with an Onboard and autonomous Computer Control, PLC and Touch Panel. The equipment consists of two robotic arms, a multi-axis pre-aligner, a wafer sensing system and a control unit. Its intuitive interface provides fast and easy operational access and control over the pre-aligner and wafer handling functions. The RR6140's six-axis robot arms are equipped with a big gripper and a small gripper respectively. The arms' independent movements provide full-range operation and delivery capability, allowing for fast and precise loading and unloading of wafers. The arms can work together or independently depending on the application's requirements. The multi-axis pre-aligner is the core of the RR6140. It is designed to detect wafer position and provide the operator with the accurate data related to wafer size and position. The device makes use of a special sensor unit to precisely measure the wafers' dimensions, orientation, and skew. The results of these measurements are used to determine the proper location for a uniform and symmetrical pre-alignment of the wafer. The RR6140 is optimized for cleanroom operation and includes a 400 mm transfer arm with a dustproof sealed structure and removable inner panels. It also includes a built-in error detection machine that monitors wafer handling and parameter abnormalities. The unit is equipped with an SMIF chamber which is used to secure wafer status. The RR6140 meets ISO 13485 and CSA certifications and is designed to guarantee long-term durability and reliability in mission-critical wafer fabrication operations. The device has been optimized for compatibility with the industry's most advanced process environments and is built for quick set-up and ease of implementation. Overall, AMAT Rorze RR6140 is an innovative and dependable wafer handling solution that is able to accurately and efficiently transport wafers in the wafer run and feed systems. Its intuitive design and ease of use makes it an ideal choice for wafer fabrication operations.
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