Used ASM DA 139F #9266304 for sale

ASM DA 139F is a state-of-the-art wafer handling equipment designed to safely and efficiently move, rotate, transfer, and process substrates up to 300 mm in diameter. It uses an advanced combination of hardware and software to provide users with higher throughputs and advanced process control. The system is designed to handle multiple substrates simultaneously and is compatible with all major wafer and substrate types, including silicon, ceramics, and metals. The machine includes two load ports, a high-speed platform, and a cooling fan used to keep the temperature of the substrates under control. The load ports are equipped with a low-profile Stage Rack (LPR). This allows for placement of the substrate in the exact position, providing increased precision during loading and unloading of the substrate. The high-speed platform is adjustable to accommodate different substrate sizes and allows for substrate processing or rotation at up to 1.5 degrees per second. The unit also includes a robotic arm to pick up and place the substrates at precisely programmed positions. The robotics are capable of performing a variety of tasks, including substrate handling, high-precision rotations, and product sorting. The robot is able to detect potential collisions between substrates and takes appropriate steps to avoid contact. The machine is end-effector agnostic and compatible with various types of end effectors from various manufacturers. The software suite, integrated into the control tool, enables users to customize operating sequences to suit their needs and to efficiently monitor asset performance. Temperature and humidity monitoring helps to ensure that the process remains within the desired temperature range, avoiding any damage to the substrates. In addition, the model is equipped with a host of diagnostic and safety features, such as automatic shutdown in the event of power loss or a fault. The equipment also maintains records of all processing parameters and provides a comprehensive library of available operations. In summary, DA 139F is a top-of-the-line wafer handling system designed to perform reliable and efficient substrate processing. The machine is built with robust robotics, custom software, and modern diagnostic and safety features. This unit is uniquely designed to provide maximum throughput and quality while minimizing costs and risks.