Used ASM DA 139L #9266306 for sale

ASM DA 139L is a state-of-the-art wafer handler that can accommodate up to 8" (200 mm) diameter wafers. It is designed to transfer wafers, between a carrier and wafer cassette, for multiple purposes such as manufacturing, process development, and operations. This unit features an IE-4500R Robot and an EcoPlate(TM) wafer handling platform, and offers movement and positioning capability for up to four wafers at a time. It also includes autoloader software which automatically creates maps of wafers in the cassette and allows for quick changeover between wafer lots. The ability to instantly modify substrate-specific recipes can help to reduce the down-time between batches. DA 139L is equipped with two cassettes;; the CLM-1300 is a continuous a cassette loader/unloader and the CW-1300 is a sub-split cassette loader/unloader. The CLM-1300 features a high-speed 50-wafer loader and unloader, which is used for single or double sided wafer carriers. The CW-1300sub-split cassette loader/unloader is used for substrate transfers between the main cassettes and the sub-split cassettes. This unit can handle up to two 8" (200 mm) diameter wafers, without additional adapters or covers. An additional, unique feature of the CW-1300 is the ability to transport up to five wafer carriers at once, saving precious time and reducing overall costs. ASM DA 139L also includes several safety features, such as an electro-sensitive protective device (ESPD) that uses motion sensors to detect any impact of foreign bodies on the robot arm and stop it immediately. Its design also includes an overload sensor, and a redundant robot arm skirt that prevents contamination and interference from external objects. Over-all, DA 139L is designed to be a reliable, cost-effective and efficient wafer handler. The system is designed to be easily integrated into existing wafer processing systems, and offers a wide range of features, including compatibility with multiple substrate processing types, configurable orientation and handling modes, and configurable automated sequences. ASM DA 139L will provide users with a reliable and powerful system that will help them achieve maximum efficiency and productivity.