Used ASML AWH MK3 #9262329 for sale

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Manufacturer
ASML
Model
AWH MK3
ID: 9262329
SCARA Robot.
ASML AWH MK3 is an advanced wafer handling machine designed for use in the semiconductor manufacturing industry. It is engineered for accuracy, speed, and reliability to ensure that the process of loading and unloading thinly sliced silicon wafers from the processing chamber is done effectively, quickly, and consistently. AWH MK3 features an advanced robotic wafer handling mechanism, which enables accurate and high-speed placement of wafers on the processing chamber's mandrels. The robot manipulator is composed of a three-link robot arm, 7-axis positioning mechanism and a device to precisely detect the position of the wafer during loading and unloading. ASML AWH MK3 is also equipped with a host of advanced sensors, including an infrared camera, a laser displacement sensor and an image processor, all of which are used to precisely detect the position of the wafer on the mandrel during operation. AWH MK3 is also equipped with an advanced wafer transportation equipment, allowing for smooth and rapid wafer transport from the wafer fabrication facility to the processing area. The transportation system features high-speed roller unit with sensors and laser-sensing technology for preventing collisions. The machine can load and unload up to 8 substrates per cycle, making it ideal for high-volume production needs. In addition, ASML AWH MK3 is designed with cutting-edge safety features. This including an energy isolation tool that isolates all electrical energy from the loading and unloading systems to prevent dangerous electricity-related accidents. The machine also has a fail-safe function that prevents the robot arm from moving in the event of any accidents or malfunctions. AWH MK3 is also equipped with a wide range of graphical user interfaces, allowing users to easily monitor, control and maintain the machine's operation. This includes a 'touchscreen monitor' with an intuitive, user-friendly and interactive graphical user interface, enabling users to maintain, configure and calibrate the asset with ease. The machine is also compatible with a wide range of automation software packages and a network interface, which allows remote access and control of the model. To maximize the performance, reliability and safety of ASML AWH MK3, comprehensive systems of diagnostics and maintenance features have been integrated into the equipment. This includes a self-test feature for verifying the performance of the system, automatic calibration for setting the correct operational parameters, and alerting indicators for detecting unit faults and malfunctions. AWH MK3 is an advanced and reliable wafer handling tool, designed for the demanding needs of the semiconductor manufacturing industry. With its high accuracy and speeds, comprehensive safety features and intuitive user interfaces, it allows users to accurately load and unload wafers with ease and confidence.
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