Used ASYS LSB03 #9000005 for sale

ASYS LSB03 is a highly reliable wafer handler, designed to transport and place wafers of up to 300mm in size. It utilizes a fully automatic wafer manipulation equipment, capable of transferring substrates of varying sizes and thicknesses. The system is designed to ensure superior accuracy and repeatability of wafer placement, as well as fast throughput rates and a long service life. The unit is equipped with a pick-and-place transfer head, which uses a special robot driven arm to securely pick up each wafer and place it into the wafer cassette tray. The pick-and-place robot uses a custom designed high-speed vision machine to accurately identify the correct wafer in the cassette and determine the exact position of the substrate relative to the robot arm. The wafers are precisely placed in the chamber at a rate of 100-300 parts per minute, with positioning accuracy of less than 0.02mm. ASYS LSB 03 is also equipped with a gas-tight lid to protect the wafer against environmental contamination. A vacuum tool is integrated to create a secure gripping of the wafer when necessary, while a series of pressure sensors are located around the wafer perimeter to ensure accurate and repeatable placement. The optional cooling asset allows for fast cooling and temperature-controlled distribution of the substrates. This reduces the time needed for cooling, as multiple wafers can be placed on a single cooling plate at the same time. LSB03 is highly user-friendly, featuring a 15-inch color touch screen display with a graphical user interface and intuitive controls. The model is designed to be integrated with existing ASYS automation solutions, providing an additional layer of functionality and efficiency. The equipment also supports remote diagnostics and maintenance, helping to minimize any potential downtime. LSB 03 is perfect for applications that require fast and precise wafer handling, such as semiconductor production and wafer-level integration. This system allows for high throughput, increased productivity, and greater accuracy. It is suitable for use in cleanroom and vacuum applications, and is available in both single and double arm configurations.