Used ASYST 9700-6148-01 #9095779 for sale

Manufacturer
ASYST
Model
9700-6148-01
ID: 9095779
Loadports.
ASYST 9700-6148-01 is a robotic wafer handler intended for processing 8 inch wafers in the semiconductor industry. It is designed to be operated in a Class 100 cleanroom environment, and is suitable for many operations other than wafer handling, including baking, probing, measurement and sorting tasks. The wafer handler consists of a main robotic assembly, an autosampler lift unit and a number of peripheral components, including vision equipment, air valves, valve assemblies and vision systems. The central robotic arm is capable of precise motion along all three axes, allowing it to quickly and accurately manipulate wafers with a maximum diameter of 200 mm. The autosampler lift unit provides a consistent, repeatable and controlled movement of 8 inch wafers in the vertical direction, allowing them to be efficiently loaded and unloaded from the wafer handler. 9700-6148-01 wafer handler also features a vision system for performing wafer inspection and measurement processes on the wafers before and after processing. The vision unit features a powerful zoom, recording and analysis functions, and is complemented by a range of lighting methods, allowing a variety of different inspection and measurement tasks to be carried out. The peripheral components of the wafer handler further contribute to its capability. The air valves enable frame-to-frame chamber motion and automation of wafer transfers, while the valve assemblies allow the precise selection and manipulation of wafer positions. The vision systems are used during transfer operations to verify wafer positions and ensure absence of sputtering, contamination and edge damages. Finally, ASYST 9700-6148-01 is designed to be a reliable and robust machine capable of performing wafer handling tasks within cleanroom environments. To meet these requirements, its components, communication machine and process control software are specially designed and tested to meet the highest standards of wafer handling and processing.
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