Used ASYST ARM 2200 #9189323 for sale

ASYST ARM 2200 is a wafer handler that is designed to move 300mm semiconductor wafers from processes to processes within a wafer fab. It is capable of handling up to two faces of wafers at one time, making it ideal for multi-layer wafer processes. This wafer handler is equipped with a fixed internal transfer chamber, designed for ultra-low particle and contamination control to ensure wafer integrity. The unit utilizes a heavy duty inverted Z-type arm that moves in a vertical plane and has adjustable technology for operation with any flat wafer. For fast operation, the unit features E3 motors which enable the arm to move the wafers quickly from the input station to the output station. The encoder equipment is optimized for high precision and repeatability to ensure accuracy in operation. This wafer handler also has a ceramic chamber to extend working cycle times and reduce the need for frequent cleaning. In addition, a multi-zone temperature control is employed for uniform temperature distribution without over-temperature conditions. ASYST ARM-2200 features a special vacuum system that is designed to safely hold and move wafers as they are transitioned between processes. An air cushion is also used to ensure that the wafer is securely held in low pressure processes. The unit also offers auto focus alignment, wafer centering, automatic temperature readjustment, and stress free HOLD/RELEASE operations. This makes it possible to achieve fine positional accuracy when transferring thin wafers between processes. The wafer handler is constructed with a stainless steel chassis that is sturdy and durable enough to last for a long period of time. It also features a contact-less wafer mount adapter and a dual-motor wafer transfer machine for improved performance. The integrated control unit of ARM 2200 has a graphical user interface (GUI) for easy operation of the unit. The unit also comes with software updates and incorporates real-time monitoring and diagnostics for enhanced reliability.