Used ASYST Axys 21 #293804866 for sale

Manufacturer
ASYST
Model
Axys 21
ID: 293804866
Vintage: 2002
Robot 2002 vintage.
ASYST Axys 21 is a high-precision, automated wafer handler designed and manufactured by ASYST Technologies, an international company that specializes in wafer and assembly automation solutions. Axys 21 is a multi-purpose tool specifically engineered to handle bare and packaged wafers in a variety of applications, including inspection, handling, test, sort, image, mark, and transfer. ASYST Axys 21 can handle wafers up to 200mm in diameter, has an accuracy in the range of 10-20µm, and can process up to 21 wafers simultaneously. It is equipped with two independent wafer chucks that enable smooth and precise wafer rotation and are tailored to handle a wide variety of substrates, such as high-temperature substrates, SOI wafers, and GaAs wafers. Designed to maximize throughput, each wafer chuck is driven by its own dual-axis motion controller to deliver up to 0.01° precision when in wafer flat position. Furthermore, the Autostation enhances wafer unloading and loading process, enabling smooth and accurate transfer to cassettes as well as facilitating the loading of dummy wafers. Its integrated options also permit diverse applications, including high-precision sorting and image processing for wafer identification and mark detection. Additionally, a touch-screen panel enables easier setup and parameter modification, as well as real-time job progress monitoring. The usage of an 8M-Byte SDRAM memory provides effective buffering for wafers during test, sort, and image processing operations. Axys 21 is designed to serve a wide range of industries, such as semi-conductor, flat panel display, and MEMs. With its built-in features, such as superior accuracy, small footprint, and broad substrate compatibility, it is an ideal wafer handler for industrial applications.
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