Used ASYST Axys 21 #9283263 for sale

ASYST Axys 21 is a wafer handler designed for automated loading and unloading of semiconductor wafer carriers within industrial-grade fabrication environments. Incorporating advanced robotic motion control and air-cushioned precision, Axys 21 can facilitate e-beam and ion implanters, as well as a variety of other wafer processing systems. This ensures the safe and reliable manipulation of wafer carriers with various sizes, weights, and shapes. The wafer handler is equipped with a sophisticated vision system to locate and grab wafers with extreme accuracy. Heavy-duty brushless (BLDC) motors provide stable and smooth motion, while the embedded optical linear encoder helps maintain positioning accuracy. To prevent damage to the wafers, the shuttles that move the wafer carriers use air-cushioned lifting mechanisms. The lift supports up to 30kg and operates in temperatures ranging from 0° C to 40° C. ASYST Axys 21 also incorporates an integrate wafer cleaning solution with an integrated brush-seated cleaning roller and liquidflow design. Axys 21 further features an intuitive touchscreen control panel and user-friendly graphical user interface for ease of operation and monitor of process states. Built-in safety features include alarms for power failure, air pressure loss, and manual operation. It also incorporates sensors that detect wafer obstruction, wafer misalignment, and other potential malfunctions. Furthermore, the wafer handler includes an E2 emergency stop selector as an additional safeguard. ASYST Axys 21 is compatible with most industry-standard semiconductor fabs and process modules. The system offers a nominal cycle time of 1.2 sec and offers a capacity of up to 1,000 wafer carriers with an optional loader. Additionally, it is designed to minimize process downtime, improve overall process efficiency, and reduce maintenance costs. In short, Axys 21 is an advanced wafer handler designed to automate the loading and unloading of wafer carriers for a wide range of applications. It incorporates an array of sophisticated motion and safety features to ensure reliable and safe operation.