Used ASYST DP2200SI #9153350 for sale
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ID: 9153350
Wafer Size: 6"-8"
Wafer sorter, 6"-8"
Installation base
BROOKS Wafer sorter:
(8) 2010/10 TSMC6 SCS2000
(4) 2011/03 TSMC8 SCS3000
(4) 2011/05 UMC8A UL-408
(4) 2012/06 UMC8S SCS3000
(3) SCS408
(3) 2013/04 SKY SCS2000
(1) 2014/8 HHGSMC SCS3000
PST Wafer sorter
(2) 2010/01 UMC8A DP2200SI/INX
(6) 2010/10 TSMC6 DP3200SI/INX
(1) 2013/02 VIS2 DP2200SI
(1) 2013/04 SKY DP1200SI/INX
(1) 2014/01 UMC8E DP3200SI/INX
(11) 2014/06 SMIC15 DP2200SI/INX
(5) 2014/08 TSMC10 DP3200SI/INX
Instrument mini-environment:
Clean air
Over-pressurization in robotic handling areas
Wafer Handling / Identification:
(2) Pods / Cassette
Cassette scanning with cross-slot detection
Vacuum probes with wafer edge detection
Automatic wafer on probe centering
Optical, non-contact, Flat/Notch finding with eccentricity correction
Supports COGNEX 1721/1741/WinOCR32/AcuReader3/WinNT system
User Interface:
Small-size PC style keyboard
Optional: SECSII/GEM interface
UI: WINDOWS XP
Wafer and system damage preventions:
Pod / Cassette in place sensing
Cross slot detection
Vacuum sensing electronics
UPS / Vacuum reservoir system
Optional wafer out of cassette sensing
Cleanliness:
Class M1 (0.01 particles at 0.02 micron per pass)
Flat / Notch finder accuracy:
± 2.0 degrees in theta
± 1 mm in centering
Vacuum: 23 ± 3 inches Hg (-0.7 x 105 Pa = 20.7 inches Hg)
Temperature: 23° ± 3°C (73.4 ± 5.4°F)
Power requirements:
100–120 Volts, 50/60 Hz, 1500 Watts maximum
200–250 Volts, 50/60 Hz, 1500 Watts maximum.
ASYST DP2200SI Wafer Handler is an ultra precision transport equipment designed to facilitate the movement of semi-conductor wafers in a range of applications. It has an advanced drive system to precisely control along the x, y, and z-axes, enabling the highest standard of reliability during wafer transportation. Its sophisticated controller allows for incorporation with existing wafer processing production lines, offering a seamless integration with various manufacturing equipment. In terms of size, the transport unit is compact yet can handle substrates up to 115mm in diameter. It's especially designed to process double sided wafers, so semi-conductor wafer production can be maximized, resulting in increased throughput and efficiency. In terms of safety, the transport machine is designed with a protective inner structure to prevent wafers from coming into contact with external parts, ensuring wafers remain contamination-free. This also ensures that no damage is caused to the wafers during the handling process. The tool has an extensive range of adaptable tools, making it suitable for a variety of applications. These tools are interchangeable, allowing for maximum flexibility during setup and execution. In addition, the asset is equipped with monitoring and inspection equipment, providing additional safety and accuracy. DP2200SI Wafer Handler is an efficient machine designed with industry-leading precision technology to maximize wafer production. It requires minimal maintenance and offers a completely automated process, meaning production can be handled with minimal operator intervention. What's more, the machine is excessively safe and reliable, preventing damage and contamination of wafers, making this machine exceptionally effective.
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