Used ASYST INX 2200 #293588012 for sale

ASYST INX 2200 is a wafer handler designed to move, align, and transfer wafers into various semiconductor fabrication processing tools, such as lithography, etch, and deposition tools. ASYST INX2200 has two linear transport mechanisms driven by 4 stepper motors. It is capable of operating at a maximum wafer handling speed of 1.0 m/sec, and a maximum transport speed of 6 m/sec. Wafers range in size from 3 inch to 8 inch and the maximum weight capacity is 2 kg. INX-2200 has a number of built-in safety features, including an auto-shutoff mechanism that activates when the wafer doesn't reach its transport target, and a power outage protection system. Additionally, the unit is equipped with a wafer centering device that can rotate and position the wafer to ensure accurate wafer handling. A wafer loading system, which utilizes a centering guide, is also included to ensure accurate placement of the wafer into the tool. ASYST INX-2200 is equipped with a number of control systems and motion controllers, which allow it to be integrated into a wide variety of semiconductor processing tools. This allows for precise and automated control of the unit and its functions. The control systems also facilitate tracking of wafer transport so that data needed for process control and statistical process control (SPC) can be reported. In addition to the wafer handling capabilities, INX 2200 can also perform wafer separation and alignment, as well as process chamber air filtration. This includes cleaning the air using a clean room filter, which prevents contamination of the wafer. This filtration also helps reduce the risks of particulate contamination. INX2200 is designed with a modular structure that allows for easy installation, maintenance and upgrade. It also supports large system integrations, such as multiple chamber systems, and its state-of-the-art technologies allow the unit to perform precise wafer handling operations. Overall, ASYST INX 2200 is a reliable and precise wafer handler designed to meet the demanding requirements of semiconductor processing operations. Its advanced control systems and safety features, as well as its modular structure make it an ideal choice for high-precision wafer handling applications.