Used ASYST INX 2200 #9175219 for sale

ASYST INX 2200 is a purpose-built automated wafer handling equipment designed for semiconductor manufacturing applications. It is designed to enable efficient and accurate transfer of wafers between process chambers, allowing for greater throughput and improved production yields. The system consists of two main components: a wafer loader and a wafer carrier. The wafer loader is used to quasi-manually load wafers into the wafer carrier. The wafer carrier then traverses the unit either on a vertical or a horizontal plane, allowing it to reach chambers located above and below the operating plane. The tool is fitted with four vertical field coils and two rotary transfer arms mounted in a vertical plane. These coils and arms allow the wafer to be precisely positioned within the wafer handling fixture. The machine is equipped with a fully automated wafer scan, which performs a series of scans and corroboration steps to verify that the wafer is in an acceptable condition for use. The scan is designed to detect warped or cracked wafers, particles, contamination, and any other imperfections. Once scanned and approved, the wafer is automatically loaded onto the wafer carrier and is ready for transfer. The wafer transfer within ASYST INX2200 is accomplished using two independent wafer chucks which are equipped with force sensitive probes. The probes sense the position of the wafer as it is being lifted from the source and lowered into the destination. The source and destination can be located either in the same chamber or in separate chambers. The wafer chucks also feature an additional self-deactivation feature to ensure that the wafer is securely held at both the source and destination locations. INX-2200 is highly reliable and easy to maintain. It is equipped with a fault diagnostics tool, making it easy to identify and isolate any issues. The tool also includes a variety of safety features, such as interlocks, that prevent the asset from commencing operation until all parameters are set correctly. ASYST INX-2200 is highly configurable, and can be customized to meet the specific requirements of each application. It also features an intuitive graphical interface, making it easy to learn and use. Overall, INX 2200 is an advanced wafer handling model designed for high-precision, high-yield wafer applications. It provides a reliable, efficient, and accurate means for transferring wafers between process chambers. It is highly configurable, making it suitable for a variety of different applications, and is easy to maintain and operate.