Used ASYST IsoPort #146783 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 146783
Wafer loaders, 12"
P/N: 9700-9129-01 Rev J
Software: 5206 2702 0800
K-plate cover, 9700-9301-01
Prot sensors, 9700-9225-01
ABCD pads, 9700-9227-01
Wafer mapper, 9700-9116-02
Options:
9701-1716 -01
9701-1719 -01
9701-1755 -01
2007 vintage.
ASYST IsoPort is a wafer handler created by ASYST Technologies that is used for the movement and handling of integrated circuit (IC) wafers. IsoPort consists of a number of different components that are all contained in a single, self-contained unit. ASYST IsoPort is a robotic unit that is comprised of two major components - the transfer robot and the handler robot. The transfer robot has six independent articulated arms with a cryo-vacuum. This is used to transport the IC wafers from one production station to the next on the integrated production line. The handler robot utilizes five highly reliable articulated arms to move IC wafers from the transfer robot to the wafer assembly area. IsoPort has been designed with precision, accuracy and flexibility as its primary goals. Therefore, ASYST IsoPort features a wafer image recognition equipment that can identify the number of wafers contained on each tray and detect any abnormalities present in the substrate. This ensures that the wafers can be transferred and handled quickly and accurately. IsoPort also boasts a unique infra-red temperature-controlled environment within the enclosure. This allows for temperature sensitive operations such as bonding without damaging the sensitive wafers. The robot is programmed to produce a quick reaction and "soft" handling when transferring or handling wafers to ensure that the substrate integrity is not compromised. ASYST IsoPort also comes with a three-dimensional mapping system so that the robotic arms are able to locate wafers accurately. The mapping unit is capable of storing up to four different production recipes and allows users to define individual mapping options for each production run. Finally, IsoPort has been designed with ease of use in mind. The user interface of ASYST IsoPort has small graphical icons that can be used to easily control the robotic arms. The operator can also check production status in the form of a graphical display for the entire production machine in one glance. Overall, IsoPort is a highly sophisticated, advanced wafer handler that provides accuracy, precision, and flexibility for IC wafer manufacturing. It utilizes a number of technologies such as cryo-vacuum, image recognition, temperature control, mapping, and graphical user interface to ensure that wafer manipulation and handling is carried out efficiently and without any damage to the sensitive substrates.
There are no reviews yet