Used ASYST IsoPort #293649502 for sale

ASYST IsoPort is a wafer handler designed to facilitate the transfer of semiconductor wafers into and out of vacuum processing tools. It is a non-contact, non-vacuum, scanning wafer-loading station that can accommodate 6- and 8-inch wafers. The main features of IsoPort include a patented silicon tip, which is a soft, sprung micrometer tip that engages the wafer on its front side (shallow) edge, and an innovative thermal scanner mechanism that maps wafer dimensions. This makes it possible to mechanically adjust to different wafer sizes and delivers safe, reliable transfer of wafers into and out of vacuum processing tools. ASYST IsoPort has a dedicated 100-micron size gap for transferring a single wafer at a time, and does not require any pre-alignment or the use of tools. Instead, it relies on the mapped thermal scanner data to maintain precise positional registrations upon transfer of the wafer at a high speed. The wafer handler uses a color touch-screen display to communicate with its host equipment, where users can control and monitor it. IsoPort signal board also provides direct visual indication of chamber locks and unload errors that may occur during transfer. This allows operators to identify and rectify errors quickly. The wafer handler is designed to devote minimum floor space, while allowing its users to easily adjust the tooling and replace components as required. The stainless-steel interior of ASYST IsoPort also allows it to handle chemically aggressive liquids and test wafers that have been exposed to harsh temperatures. To ensure maximum system uptime, IsoPort has various built-in unit diagnostics, including a self-diagnosing fan that monitors and reports errors. It also includes an integrated closed loop feedback machine with real-time sensors for more accurate calibration and a real-time thermocouple for precise thermal transfer of wafers. Overall, ASYST IsoPort is a versatile wafer handler that is designed to offer reliable performance and fast wafer transfer. Its innovative thermal scanner and sensor-based feedback systems permit precise positional registration during transfer and allow users to monitor the tool in real-time. IsoPort is engineered to deliver maximum asset uptime and minimal-footprint setup.