Used ASYST IsoPort #293768262 for sale
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ASYST IsoPort is an automated wafer handler equipment used in the production of semiconductors. The device is designed to handle wafers of various sizes (including 6 inch and 8 inch wafers) and to place them into process chambers. IsoPort is constructed of stainless steel and provides a stable, safe, and secure environment for wafer transfer. The device is capable of speeds up to 124 wafer per hour, with an average transfer rate of 90 wafer per hour. The device design includes a vacuum system with two stages that picks and places the wafer. These stages consist of the drive motor which controls the speed of the process, and the vacuum head which is responsible for grabbing the wafer. The latter component is designed to be compatible with any front opening unified pod (FOUP) or flat cassette. ASYST IsoPort provides a low particle environment for all critical process parameters such as particle count, aerosol, humidity, and temperature. The device is designed with an ultra-clean interior and features an interior lighting unit designed to detect particles. The air filtration machine on IsoPort uses high-efficiency particulate air (HEPA) filters for maximum particle control. The safety of the wafer handling process is further enhanced by the design of the wafer handling robot. The robot has dedicated motion optical systems that provide a three-axis sensing tool which can recognize objects with a high degree of accuracy. This asset includes a vision sensor that recognizes the shape, size, and orientation of a wafer as well as a laser rangefinder to measure the distance between the robot's end effector and the wafer. The robot can detect any abnormal conditions and immediately stop to avoid damage to the wafer. ASYST IsoPort is equipped with a highly efficient fault-tolerant control model designed for uninterrupted operation. This feature ensures that the wafer handler is able to operate through power failures, communication errors, and environmental disturbances. Additionally, the device is designed with an intuitive, user-friendly control interface that allows it to be remotely controlled from a computer or control console. Overall, IsoPort is an efficient, reliable, and safe equipment for handling wafers of various sizes. The device is capable of handling over a hundred wafers per hour and can provide a secure and stable environment for wafer transfer. ASYST IsoPort is equipped with various safety features to protect wafers from damage or other potential hazards that may be encountered during handling. The device is also designed with a highly efficient fault-tolerant control system and a user-friendly control interface, making it suitable for a variety of applications.
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